Beam irradiation apparatus, beam irradiation method, and method for manufacturing a thin film transistor
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorKoichiro Tanaka
Life of this patent
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Abstract
A galvanometer mirror rotates in one direction when the galvanometer mirror is used. A spot can be scanned on an irradiated surface at a more constant speed by rotating the galvanometer mirror and by using the inertia. Moreover, it is preferable to make the galvanometer mirror heavy because the inertia becomes higher so that the spot is scanned at a more constant speed. In addition, in a polygon mirror of this invention, mirrors are arranged so as not to contact each other because a change time of the scanning position between the mirrors is provided. By moving the irradiated object with timing together when the laser light is not irradiated, the laser process can be performed efficiently.
Claims26
A beam irradiation apparatus comprising:
- a laser oscillator for emitting an energy beam;
- a specular body;
- a shaft;
- a stage;
- and
- a lens between the specular body and the stage on the optical axis of the beam,
- wherein the specular body is fixed to a shaft so as to be set on an optical axis of the energy beam, and
- wherein the specular body fully rotates using the shaft as its center.
A beam irradiation apparatus comprising:
- a laser oscillator for emitting an energy beam;
- a specular body;
- a shaft;
- a control apparatus;
- a stage;
- and
- a lens between the specular body and the stage on the optical axis of the beam,
- wherein the specular body is fixed to a shaft so as to be set on an optical axis of the energy beam, and
- wherein the specular body fully rotates using the shaft as its center
- wherein the rotation of the specular body is controlled by the control apparatus.
A beam irradiation apparatus comprising:
- a laser oscillator for emitting an energy beam;
- a specular body;
- a shaft;
- a stage;
- and
- wherein the energy beam and the stage are relatively moved,
- wherein the specular body is fixed to a shaft so as to be set on an optical axis of the energy beam, and
- wherein the specular body fully rotates using the shaft as its center.
Dependencies are inferred from the claim text.