Spectroscopy system
AssigneeWaferMasters, Inc.
InventorWoo Sik Yoo
Life of this patent
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Abstract
Systems and techniques for improved spectroscopy. In some embodiments, mechanical and/or optical zoom mechanisms may be provided for monochromator systems. For example, movable detector systems allow a detector to be positioned with respect to a dispersive element in order to obtain a first resolution. The detector systems may then allow the detector to be positioned with respect to a dispersive element to obtain a second different resolution. In some embodiments, spectroscopy of a first sample region may be performed using a plurality of excitation wavelengths. Multiple detectors may be positioned to receive light associated with different ones of the plurality of excitation wavelengths.
Claims21
A monochromator system, comprising:
- an optical system configured to receive light scattered from a first region of a sample surface in response to receiving light at a plurality of excitation wavelengths and to disperse the received light according to wavelength;
- a first detector mounted to a first moveable detector mount;
- a second detector mounted to a second moveable detector mount;
- wherein the first moveable detector mount is configured to move the first detector to a first position associated with a first excitation wavelength of the plurality of excitation wavelengths, and wherein the second moveable detector mount is configured to move the second detector to a second position associated with a second different excitation wavelength of the plurality of excitation wavelengths;
- and wherein a first detector configuration allows for positioning the detectors at different distances from the optical system to provide a substantially equal resolution;
- and wherein the first detector is further configured to detect a received portion of light scattered from the first region of the sample surface in response to receiving light at the first excitation wavelength at a first time, and wherein the second detector is further configured to detect a received portion of light scattered from the first region of the sample surface in response to receiving light at the second excitation wavelength at the first time.
A spectroscopy method comprising:
- generating excitation light comprising a plurality of substantially discrete excitation wavelengths including a first excitation wavelength and a second excitation wavelength;
- scattering the excitation light from a first region of a sample;
- dispersing the scattered light according to wavelength with a disperser;
- positioning a first detector and second detector in a second configuration that positions the detectors at a substantially equal distance from the disperser;
- receiving a first portion of the dispersed light at the first detector positioned in a first configuration that allows the first detector to receive light associated with the first excitation wavelength;
- receiving a second different portion of the dispersed light at the second detector positioned in the first configuration that allows the second detector to receive light associated with the second excitation wavelength;
- and determining one or more characteristics of the first region of the sample based on the first portion and the second portion, wherein the first configuration positions the detectors at different distances from the disperser to provide a substantially equal resolution.
The method of claim, 12, wherein the depth profile comprises data indicative of one or more physical characteristics of the first region of the sample at the first depth and data indicative of one or more physical characteristics of the first region of the sample at the second depth.
A system comprising:
- an optical assembly adapted to receive light scattered from a sample in response to receiving light at a plurality of excitation wavelengths and to disperse the received light according to wavelength;
- and
- a plurality of detector assemblies adapted to be moveable to different positions associated with a different excitation wavelengths of the plurality of excitation wavelengths,
- wherein a first configuration positions the detector assemblies at different distances from the optical assembly to provide a substantially equal resolution, and
- wherein a second configuration positions the detectors at a substantially equal distance from the optical assembly.
Dependencies are inferred from the claim text.