Burn-in system with heating blocks accommodated in cooling blocks
AssigneeAdvantest Corporation
InventorsKazunari Suga, Toru Honobe, Seigo Matsunaga, Kazumi Kita
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AssigneeAdvantest Corporation
InventorsKazunari Suga, Toru Honobe, Seigo Matsunaga, Kazumi Kita
Estimating the term…
A burn-in system enabling the temperatures of a large number of electronic devices differing in amount of self generated heat to be simultaneously reliably adjusted to a predetermined temperature, that is, a burn-in system bringing heater blocks having heaters, cooling blocks formed with channels able to carry a coolant, and sensor blocks having temperature sensors into contact with a plurality of DUTs mounted on a burn-in board and simultaneously performing a burn-in test on the plurality of DUTs, wherein each cooling block is formed with a first accommodating space and second accommodating space, each heater block is accommodated in a first accommodating space in a state maintaining clearance from the inside wall surfaces, and each sensor block is accommodated in a second accommodating space in a state maintaining clearance from the inside wall surfaces.
A burn-in system for conducting a burn-in test on a plurality of devices under test mounted on a burn-in board, comprising:
Dependencies are inferred from the claim text.