US 7,397,257 B2 · Detection method/device of probe's tip location using a transparent film attached to a substate having plurality of electrodes, and a storage medium for implementing the method

Abstract

A method for detecting tip positions of probes which is performed prior to the wafer test includes a first step of attaching the transparent film F on the test substrate W having the electrodes P arranged same as those of the wafer; a second step of detecting the electrodes P of the test substrate W by using the first CCD camera 13A; a third step of detecting a surface height of the transparent film F; a fourth step of position-aligning the electrodes P of the test substrate W with the probes 12A. The method further includes a fifth step of forming the probe marks M on the transparent film F by making the probes 12A contact with the transparent film F; and a sixth step of detecting tip positions of the probes 12A based on the electrodes P of the test substrate W and the probe marks M.

Claims16

Dependent claims

A method for detecting tip positions of a plurality of probes to perform an electrical characteristic test on a target object to be inspected by making the probes electrically contact with the target object, the method comprising:

a first step of attaching a transparent film on a substrate having a plurality of electrodes arranged identical to those of the target object;
a second step of detecting the electrodes of the substrate through the transparent film by using an imaging unit;
a third step of obtaining a surface height of the transparent film;
a fourth step of position-aligning the probes and the electrodes of the substrate which are detected in the second step;
a fifth step of forming probe marks on the transparent film by making the probes contact with the transparent film based on the surface height;
and
a sixth step of detecting the tip positions of the probes based on the electrodes and the probe marks on the transparent film.

4 more elements

A probe device for detecting tip positions of a plurality of probes, based on probe marks formed by the probes on a transparent film attached on a substrate having a plurality of electrodes arranged identical to those of a target object to be inspected, to perform an electrical characteristic test on the target object under a control of a control unit by making the probes contact with the target object, the device comprising:

an imaging unit for imaging the substrate;
a unit for obtaining a surface height of the transparent film;
a unit for position-aligning the electrodes and the probes by capturing images of the substrate through the transparent film with the use of the imaging unit;
a unit for forming probe marks on the transparent film by making the probes contact with the transparent film based on the surface height;
and
a unit for detecting the tip positions of the probes based on the electrodes and the probe marks formed on the transparent film.

3 more elements

Dependencies are inferred from the claim text.

Detection method/device of probe's tip location using a transparent film attached to a substate having plurality of electrodes, and a storage medium for implementing the method

Life of this patent

Detection method/device of probe's tip location using a transparent film attached to a substate having plurality of electrodes, and a storage medium for implementing the method

Life of this patent

Abstract

Claims16