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AssigneeKLA-Tencor Technologies Corporation
InventorsXiafang (Michelle) Zhang, Zhiwei (Steve) Xu, Jianou Shi, Quoc-Bao Vu, Thomas G. Miller, Gregory S. Horner
Estimating the term…
Methods for determining an electrical parameter of an insulating film are provided. One method includes measuring a surface potential of a leaky insulating film without inducing leakage across the insulating film and determining the electrical parameter from the surface potential. Another method includes applying an electrical field across the insulating film. Leakage across the insulating film caused by the electrical field is negligible. The method also includes measuring a surface potential of the specimen and determining a potential of the substrate. In addition, the method includes determining a pure voltage across the insulating film from the surface potential and the substrate potential. The method further includes determining the electrical parameter from the pure voltage. The electrical parameter may be capacitance or electrical thickness of the insulating film.
A method, comprising measuring a surface potential of a leaky insulating film without inducing leakage across the insulating film and determining an electrical parameter of the insulating film from the surface potential, wherein said determining comprises determining a potential of a substrate on which the insulating film is formed, determining a pure voltage across the insulating film from the surface potential and the substrate potential, and determining the electrical parameter of the insulating film from the pure voltage.
A method for determining an electrical parameter of an insulating film, wherein a specimen comprises the insulating film formed on a substrate, the method comprising:
Dependencies are inferred from the claim text.