Gas discharge lamp for extreme UV radiation
AssigneeKoninklijke Philips Electronics N.V.
InventorsGuenther Hans Derra, Joseph Robert Rene Pankert, Willi Neff, Klaus Bergmann, Jeroen Jonkers
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Abstract
The invention relates to a gas discharge lamp for EUV radiation with an anode (1) and a hollow cathode (2), wherein the hollow cathode (2) has at least two openings (3, 3′) and the anode (1) has a through hole (4), which is characterized in that the longitudinal axes (5, 5′) of the hollow cathode openings (3) have a common point of intersection S lying on the axis of symmetry (6) of the anode opening (4).
Claims13
A gas discharge lamp for EUV radiation with an anode (1) and a hollow cathode (2), wherein the hollow cathode (2) has at least two openings (3, 3′) and the anode (1) has a through opening (4), characterized in that the longitudinal axes (5, 5′) of the hollow cathode openings (3) have a common point of intersection S which lies on the axis of symmetry (6) of the anode opening (4).
Dependencies are inferred from the claim text.