Solid state vacuum devices

A solid state thermionic pentode, comprising:

• a first substrate having a cavity formed on one side with an oxide layer coating the one side and a surface of the cavity;
• an anode formed in the cavity and adjacent to the oxide layer;
• a grid structure, comprising:
• a first electrode formed above the anode in the cavity;
• a first insulating layer formed between the first electrode and the anode;
• a second electrode formed between the first insulating layer and the anode;
• a second insulating layer formed between the second electrode and anode;
• and
• a third electrode formed between the second insulating layer and the anode;
• and
• a plurality of slots passing through the grid structure to allow passage of electrons therethrough;
• a second substrate opposite the first substrate having a void formed therein;
• a cathode disposed between the void and the first electrode;
• a means for heating the cathode;
• and
• a seal between the first and the second substrates to enclose the cavity, the grid structure and the void of the pentode in a controlled environment.

A solid state thermionic triode, comprising:

• a first substrate having a cavity formed on one side with an oxide layer coating the one side and a surface within the cavity;
• an anode disposed within the cavity and adjacent to the oxide layer;
• a grid structure, comprising;
• a grid disposed above the anode near the cavity;
• a first conducting layer disposed on a surface of the grid closest to the anode;
• and
• a plurality of slots passing through the grid structure to allow passage of electrons therethrough;
• a second substrate opposite the first substrate having a void formed in one side thereof;
• a cathode disposed between the void and the grid;
• a means for heating the cathode;
• and
• a seal between the first and the second substrates to enclose the cavity and the void of the triode.

A solid state thermionic triode, comprising:

• a first substrate having a cavity formed on one side with an oxide layer coating the one side and a surface within the cavity;
• an anode disposed within the cavity and adjacent to the oxide layer;
• a grid disposed above the anode near the cavity;
• a first conducting layer disposed on a surface of the grid closest to the anode;
• a second substrate opposite the first substrate having a void formed in one side thereof;
• a cathode disposed between the void and the grid;
• a means for heating the cathode;
• and
• a seal between the first and the second substrates to enclose the cavity and the void of the triode.