Piezoelectric resonator element, piezoelectric device and gyro sensor
AssigneeSeiko Epson Corporation
InventorMasayuki Kikushima
Life of this patent
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Abstract
A piezoelectric resonator element, comprises: a base made of a piezoelectric material; at least a pair of resonating arms provided in a unified manner with the base and extending in parallel with each other from the base; a portion defining a long groove provided to each of the resonating arms along a longitudinal direction; and a driving electrode provided to the long groove. Each of the resonating arms includes a structure to adjust hardness balance between right and left structures with respect to a virtual central line extending in the longitudinal direction.
Claims12
A piezoelectric resonator element, comprising:
- a base made of a piezoelectric material;
- at least a pair of resonating arms provided in a unified manner with the base and extending in parallel with each other from the base;
- a portion defining a long groove provided to each of the resonating arms along a longitudinal direction;
- a driving electrode provided to the long groove;
- wherein each of the resonating arms includes a structure to adjust hardness balance between right and left structures with respect to a virtual central line extending in the longitudinal direction;
- and
- wherein a right constricted portion and a left constricted portion with respect to the virtual central line are provided to a base portion of each of the resonating arms so as to make a width of the resonating arms large on the base side and make the width sharply reduce toward each end portion, and the right constricted portion is made larger than the left constricted portion as the structure to adjust.
A piezoelectric resonator element, comprising:
- a base made of a piezoelectric material;
- at least a pair of resonating arms provided in a unified manner with the base and extending in parallel with each other from the base;
- a portion defining a long groove provided to each of the resonating arms along a longitudinal direction;
- a driving electrode provided to the long groove;
- wherein each of the resonating arms includes a structure to adjust hardness balance between right and left structures with respect to a virtual central line extending in the longitudinal direction;
- and
- wherein the structure to adjust is disposed proximate to a base portion of each of the resonating arms and the long groove includes a first width at the structure to adjust and a second width, different than the first width, between an end of the structure to adjust and an end of a respective resonating arm.
A piezoelectric resonator element, comprising:
- a base made of a piezoelectric material;
- at least a pair of resonating arms provided in a unified manner with the base and extending in parallel with each other from the base;
- a portion defining a long groove provided to each of the resonating arms along a longitudinal direction;
- a driving electrode provided to the long groove;
- wherein each of the resonating arms includes a structure to adjust hardness balance between right and left structures with respect to a virtual central line extending in the longitudinal direction;
- and
- wherein the structure to adjust is disposed at an end portion of each of the resonating arms and includes a first portion that is larger than a second portion with respect to the virtual central line, the first portion extending in the same direction from the virtual center line on each resonating arm.
Dependencies are inferred from the claim text.