Ultrasonic wave generating device
AssigneeDenso Corporation
InventorsMakiko Sugiura, Takahiko Yoshida, Yasuyuki Okuda, Ryonosuke Tera, Hiroshi Tanaka, Yuta Hasebe
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Abstract
An ultrasonic wave generating device includes a substrate, a heat insulation layer on the substrate, a membrane heating portion on the heat insulation layer, and a membrane oscillator on the heating portion. The heating portion is electrically driven with a predetermined period, and produces heat for thermally displacing a surface of the oscillator. The oscillator receives a temperature variation with the predetermined period from the heating portion, and oscillates so as to generate ultrasonic waves.
Claims18
An ultrasonic wave generating device comprising:
- a substrate;
- a heat insulation layer on the substrate;
- a membrane heating portion on the heat insulation layer;
- and
- a membrane oscillator on the heating portions, wherein
- the membrane oscillator covers the heating portion,
- the heating portion is electrically driven with a predetermined period, and produces heat for thermally displacing a surface of the oscillator, and
- the oscillator receives a temperature variation with the predetermined period from the heating portion, and oscillates so as to generate ultrasonic waves.
An ultrasonic wave generating device comprising:
- a substrate;
- a heat insulation layer on the substrate;
- a membrane heating portion on the heat insulation layer;
- and
- a membrane oscillator on the heating portion, wherein
- the membrane oscillator covers at least part of the heating portion,
- the heating portion is electrically driven with a predetermined period, and produces heat for thermally displacing a surface of the oscillator, and
- the oscillator receives a temperature variation with the predetermined period from the heating portion, and oscillates to generate ultrasonic waves.
Dependencies are inferred from the claim text.