Method of forming nano-sized MTJ cell without contact hole
AssigneeSamsung Electronics Co., Ltd.
InventorsSoon-won Hwang, I-hun Song, Geun-young Yeom, Seok-jae Chung
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Abstract
Provided is a method of manufacturing a nano-sized MTJ cell in which a contact in the MTJ cell is formed without forming a contact hole. The method of forming the MTJ cell includes forming an MTJ layer on a substrate, forming an MTJ cell region by patterning the MTJ layer, sequentially depositing an insulating layer and a mask layer on the MTJ layer, exposing an upper surface of the MTJ cell region by etching the mask layer and the insulating layer at the same etching rate, and depositing a metal layer on the insulating layer and the MTJ layer.
Claims1
A magnetic tunnel junction (MTJ) cell, comprising:
- a substrate;
- a magnetic tunnel junction (MTJ) layer located on said substrate, wherein said magnetic tunnel junction layer includes a base layer that is conductive, a lower material layer having magnetic properties, an insulating layer, an upper material layer having magnetic properties, and a cap layer that is conductive and wherein said lower material layer having magnetic properties, said insulating layer, said upper material layer having magnetic properties, and said cap layer that is conductive are smaller in area than said base layer;
- an insulating layer located in said base layer and surrounding said lower material layer having magnetic properties, said insulating layer, said upper material layer having magnetic properties, and said cap layer that is conductive;
- and
- a metal layer located on a top surface of said MTJ layer and said insulating layer, such that A contact is formed between the cap layer of the MTJ layer and the metal layer without forming a contact hole.
Dependencies are inferred from the claim text.