Method and apparatus for specimen fabrication
AssigneeHitachi, Ltd.
InventorsSatoshi Tomimatsu, Kaoru Umemura, Yuichi Madokoro, Yoshimi Kawanami, Yasunori Doi
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Abstract
A specimen fabrication apparatus including: a vacuum chamber that accommodates a sample stage to mount a sample, an irradiating optical system that irradiates a focused ion beam to the sample to form a specimen, and a specimen holder placed in the vacuum chamber, to which said formed specimen is transferred by transferring means while the specimen chamber remains substantially sealed.
Claims9
A specimen fabrication apparatus comprising:
- a vacuum chamber that accommodates a sample stage to mount a sample,
- an irradiating optical system that irradiates a focused ion beam to the sample to form a specimen, and
- a specimen holder placed in the vacuum chamber, to which said formed specimen is transferred by transferring means while the specimen chamber remains substantially sealed.
A specimen fabrication apparatus comprising:
- a vacuum chamber that accommodates a sample stage to mount a sample,
- a first irradiating optical system that irradiates a focused ion beam to the sample to form a specimen,
- a specimen holder placed in the vacuum chamber, to which said formed specimen is transferred by transferring means while the specimen chamber remains substantially sealed,
- a second irradiating optical system that irradiates an electron beam to the sample or to the specimen, and
- a display means to display a SEM image based on a secondary electron generated by the irradiation with the electron beam.
A specimen fabricating apparatus that fabricates a specimen from a sample by irradiation of an ion beam, comprising:
- a first specimen stage of a side-entry type that mounts the sample,
- a second specimen stage that accommodates a specimen holder on which the specimen is placed, and
- a transferring means that transfers the specimen to the specimen holder accommodated by the second specimen stage.
A specimen fabricating apparatus that fabricates a specimen from a sample by irradiation of an ion beam, comprising:
- a first specimen stage of a side-entry type that mounts the sample,
- a transferring means that holds the fabricated specimen, and
- a second specimen stage to which the specimen held by the transferring means is placed.
Dependencies are inferred from the claim text.