Method and apparatus for specimen fabrication
AssigneeHitachi, Ltd.
InventorsSatoshi Tomimatsu, Kaoru Umemura, Yuichi Madokoro, Yoshimi Kawanami, Yasunori Doi
Life of this patent
Estimating the term…
Abstract
A specimen fabrication apparatus, including: an ion beam irradiating optical system to irradiate a sample placed in a chamber, with an ion beam, a specimen holder to mount a specimen separated by the irradiation of the ion beam, a holder cassette to hold the specimen holder, and a sample stage to hold the sample and the holder cassette, wherein said holder cassette is transferred to outside of the chamber in a condition of holding said specimen holder with the specimen mounted.
Claims25
A specimen fabrication apparatus, comprising:
- an ion beam irradiating optical system to irradiate a sample placed in a chamber, with an ion beam,
- a specimen holder to mount a specimen separated by the irradiation with the ion beam,
- a holder cassette to hold the specimen holder, and
- a sample stage to hold the sample and the holder cassette,
- wherein said holder cassette is transferred to outside of the chamber in a condition of holding said specimen holder with the specimen mounted.
A specimen fabrication apparatus, comprising:
- an ion beam irradiating optical system to irradiate a sample placed in a chamber, with an ion beam,
- a specimen holder to mount a specimen separated by the irradiation with the ion beam,
- a holder cassette to hold the specimen holder,
- a sample stage to hold the sample and the holder cassette,
- wherein said holder cassette is attachable and detachable to the sample stage, and said holder cassette is carried out in a condition of holding the specimen holder.
A specimen fabrication apparatus, comprising:
- a sample stage to mount a sample,
- a chamber in which the sample stage is placed,
- an irradiating optical system that irradiates the sample with an ion beam,
- a specimen holder to mount a specimen separated by the irradiation with the ion beam,
- a holder cassette to hold the specimen holder, and
- a transferring means to move the specimen to the specimen holder,
- wherein said holder cassette is conveyed outside the chamber with said specimen.
A specimen analyzing method, comprising:
- irradiating a desired portion of a sample on a specimen fabrication apparatus, with an ion beam, so that a specimen is formed,
- mounting the specimen on a specimen holder attached to a holder cassette, and
- carrying the specimen outside the specimen fabrication apparatus using the holder cassette, and into a specimen analyzing apparatus.
A specimen analyzing method, comprising:
- a step for irradiating a sample placed in a chamber with an ion beam so that a specimen is formed,
- a step for mounting the specimen on a specimen holder attached to a holder cassette, and
- a step for moving the holder cassette outside the chamber in a condition that the specimen holder mounted with the specimen is attached.
Dependencies are inferred from the claim text.