Sulfonium salts
AssigneeToyo Gosei Co., Ltd.
InventorsJun Iwabuchi, Yosuke Osawa
Life of this patent
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Abstract
The present invention provides a sulfonium salt which can serve as a photo-acid-generator, the sulfonium salt not raising the problem of poor compatibility to a photoresist polymer having an acid-dissociable group. The sulfonium salt is represented by formula (1): wherein R1 represents a linear or branched C2 to C9 divalent hydrocarbon group; each of R2 to R5 represents a hydrogen atom or a linear or branched C1 to C3 hydrocarbon group; each of R6 and R7 represents an organic group; R6 and R7 may be linked together to form a divalent organic group; and X− represents an anion.
Claims1
A sulfonium salt represented by formula (1):
- wherein R1 represents a linear or branched C2 to C9 divalent hydrocarbon group;
- each of R2 to R5 represents a hydrogen atom or a linear or branched C1 to C3 hydrocarbon group;
- each of R6 and R7 represents a phenyl group or a phenyl group which has a substituent having a C1 to C30 alkyl group, or R6 and R7 together with S atom to which they are attached form a heterocyclic ring with a saturated carbon of C3 to C9 alkyl groups;
- and X− is an anion which is represented by formula (2), or represented by formula (3) which is a bis(perfluoroalkylsulfon)imide ion, or Cl−, Br−, I−, BF4−, AsF6−, SbF6−, or PF6−,
- CkHmFnSO3− (2)
- wherein each of k, m, and n is an integer of ≧0;
- when m is 0, k is an integer of 1 to 8, n is 2k+1, and formula (2) represents a perfluoroalkylsulfonate ion;
- when n is 0, k is an integer of 1 to 15, m is an integer of ≧1, and formula (2) represents an alkylsulfonate ion, a benzenesulfonate ion, or an alkylbenzenesulfonate ion;
- and when each of m and n is an integer of ≧1, k is an integer of 1 to 10, and formula (2) represents a fluorinated benzenesulfonate ion, a fluorinated alkylbenzenesulfonate ion, or a fluorinated alkylsulfonate ion,
- (CpF2p+1SO2)2N− (3)
- wherein p represents an integer of 1 to 8.
Dependencies are inferred from the claim text.