Process for production of trialkoxyhalosilanes

A process for production of trialkoxy(dialkylamino) silanes, comprising:

• a first step which comprises reacting a tetrahalosilane represented by Formula 1 with a tetraalkoxysilane represented by Formula 2 in the mixture of an alcohol composed of the same alkoxy group as that of the tetraalkoxysilane to yield a trialkoxyhalosilane represented by Formula 3, wherein the alcohol is used in an amount of 10-50% by mol based on a total amount of Si in the tetrahalosilane and the tetraalkoxysilane:
• SiX4 [Formula 1]
• (where X denotes halogen)
• Si(OR1)4 [Formula 2]
• (where R1 denotes a hydrocarbon group having 1-6 carbon atoms)
• XSi(OR1)3 [Formula 3]
• (where X denotes halogen;
• and R1 a hydrocarbon group having 1-6 carbon atoms);
• and
• and a second step of reacting the trialkoxy halosilane obtained in the first step with a dialkylamine represented by Formula 7 to yield a trialkoxy(dialkylamino) silane represented by Formula 8:
• R2R3NH [Formula 7]
• (where R2 denotes a hydrocarbon group having 1-12 carbon atoms;
• and R3 a hydrocarbon group having 1-12 carbon atoms)
• R2R3NSi(OR1)3 [Formula 8]
• (where R1 denotes a hydrocarbon group having 1-6 carbon atoms;
• R2 a hydrocarbon group having 1-12 carbon atoms;
• and R3 a hydrocarbon group having 1-12 carbon atoms).