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US 7,396,706 B2Granted
Synchronization technique for forming a substantially stable laser output pulse profile having different wavelength peaks
AssigneeElectro Scientific Industries, Inc.
InventorsYunlong Sun, Richard Harris, William J. Jordens, Lei Sun
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Abstract
A specially shaped laser pulse energy profile characterized by different laser wavelengths at different times of the profile provides reduced, controlled jitter to enable semiconductor device micromachining that achieves high quality processing and a smaller possible spot size.
Claims20
A method of generating a laser pulse with a stable energy profile including a first laser energy feature at first laser wavelength in a first part of the profile and a second laser energy feature at second laser wavelength in a second part of the profile, comprising:
- providing a first laser head from which first laser energy at a first wavelength and characterized by a first energy profile feature propagates in response to a first drive signal and a second laser head from which second laser energy at a second wavelength and characterized by a second energy profile feature propagates in response to a second drive signal, the first and second drive signals being developed in synchronism in response to a timing command signal and thereby exhibiting relative jitter in a range that is confined within an operational tolerance;
- establishing a delay between the first and second laser energies;
- and
- forming a laser output pulse characterized by output pulse energy profile features corresponding at least in part to the first and second energy profile features, the output pulse energy profile features being separated temporally by the delay established between the first and second laser energies.
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Dependencies are inferred from the claim text.