Method for manufacturing a thin film transistor
AssigneeInnolux Display Corp.
InventorsChiang-Hung Tseng, Jia-Pang Pang, Chih-Cheng Lin, Tse Wu
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Abstract
A method for manufacturing a thin film transistor (TFT) includes the steps of: providing a substrate (1); and forming a TFT circuit on the substrate using laser-induced chemical vapor deposition (LCVD). Detailedly, the method includes providing the bare substrate, cleaning the substrate with cleaning liquid, and successively forming a gate electrode (2), a gate oxide layer (3), a source electrode (5), and a drain electrode (6) on the substrate by LCVD, thus obtaining the thin film transistor. The forming steps may be controlled by one or more computer programs. The LCVD can be pyrolytic LCVD, photolytic LCVD, or photophysical LCVD. The method is simple and inexpensive.
Claims16
A method for manufacturing a thin film transistor (TFT), comprising:
- (a) providing a substrate;
- and
- (b) forming a TFT circuit on the substrate using laser-induced chemical vapor deposition (LCVD), wherein step (b) comprises:
- depositing a gate electrode on the substrate;
- forming a gate oxide layer on the substrate, the gate oxide layer covering the gate electrode;
- depositing a data line on the gate oxide layer, the data line being perpendicular to the gate electrode;
- depositing a source electrode comprising two parallel metal strips, one end of each metal strip being connected to the data line;
- and
- depositing a drain electrode generally between the two metal strips of the gate electrode, the drain electrode being separate from the data line and the gate electrode.
A method for manufacturing a thin film transistor (TFT), comprising:
- (a) providing a substrate;
- and
- (b) forming a TFT circuit on the substrate using laser-induced chemical vapor deposition (LCVD), wherein step (b) comprises:
- depositing a gate electrode on the substrate;
- forming a gate oxide layer on the substrate, the gate oxide layer covering the gate electrode;
- depositing a source electrode comprising two parallel metal strips, one end of each metal strip being connected to the data line;
- depositing a data line on the gate oxide layer, the data line being perpendicular to the gate electrode and being connected to one end of each metal strip of the source electrode;
- and
- depositing a drain electrode generally between the two metal strips of the gate electrode, the drain electrode being separate from the data line and the gate electrode.
Dependencies are inferred from the claim text.