Coat/develop module with shared dispense
AssigneeSokudo Co., Ltd.
InventorsTetsuya Ishikawa, Rick Roberts
Life of this patent
Estimating the term…
Abstract
An apparatus for dispensing fluid during semiconductor substrate processing operations. The apparatus includes a central fluid dispense bank comprising a plurality of dispense nozzles coupled to a plurality of fluid sources and a first processing chamber positioned to a first side of the central fluid dispense bank. The apparatus also includes a second processing chamber positioned to a second side of the central fluid dispense bank and a dispense arm adapted to translate between the central fluid dispense bank, the first processing chamber, and the second processing chamber.
Claims16
An apparatus for dispensing fluid during semiconductor substrate processing operations, the apparatus comprising:
- a central fluid dispense bank comprising a plurality of dispense nozzles coupled to a plurality of fluid sources;
- a first processing chamber positioned to a first side of the central fluid dispense bank;
- a second processing chamber positioned to a second side of the central fluid dispense bank;
- and
- a dispense arm adapted to translate along a longitudinal axis between the central fluid dispense bank, the first processing chamber, and the second processing chamber;
- wherein the dispense arm is configured to pick up and transfer at least one dispense nozzle, selected from the plurality of dispense nozzles, to a first position in the first processing chamber or to a second position in the second processing chamber.
An apparatus for dispensing fluid during semiconductor processing operations, the apparatus comprising:
- a central fluid dispense bank comprising a plurality of dispense nozzles coupled to a plurality of fluid sources;
- a first processing chamber positioned to a first side of the central fluid dispense bank;
- a first dispense arm adapted to translate along a longitudinal axis between the central fluid dispense bank and the first processing chamber;
- wherein the first dispense arm is configured to pick up and transfer at least one dispense nozzle, selected from the plurality of dispense nozzles, to a first position in the first processing chamber;
- a second processing chamber positioned to a second side of the central fluid dispense bank;
- and
- a second dispense arm adapted to translate along a longitudinal axis between the central fluid dispense bank and the second processing chamber;
- wherein the second dispense arm is configured to pick up and transfer at least one dispense nozzle, selected from the plurality of dispense nozzles, to a second position in the second processing chamber.
Dependencies are inferred from the claim text.