Monocrystalline diamond layer and method for the production thereof
AssigneeUniversität Augsburg
InventorsMatthias Schreck, Stefan Gsell, Bernd Stritzker
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Abstract
This invention relates to a method for the production of diamond films with low misorientation through the deposition of diamond on a film system, whereby the film system exhibits a substrate film made of monocrystalline silicon or silicon carbide, at least one buffer film arranged on that, and at least one metal film made of a refractory metal arranged on that, whereby the diamond is deposited on the at least one metal film.
Claims19
Diamond film arranged on a body containing a substrate containing at least one of silicon and silicon carbide, at least one buffer film and at least one metal film made of iridium, whereby the diamond film is deposited on the at least one metal film.
A method for the production of diamond films with little misorientation through deposition of diamond on a film system wherein the film system exhibits a substrate film comprising at least one of monocrystalline silicon and silicon carbide, at least one buffer film arranged on that, at least one metal film made of iridium arranged on that, and diamond deposited on the at least one metal film.
A method for producing a component in one of mechanics, micromechanics, electronics, microelectronics, optics, and surgery, the method comprising deposition of diamond on a film system wherein the film system exhibits a substrate film comprising at least one of monocrystalline silicon and silicon carbide, at least one buffer film arranged on that, at least one metal film made of iridium arranged on that, and diamond deposited on the at least one metal film.
A method for producing at least one of a cutting edge, a scalpel, a growth substrate for the epitaxial growth of at least one of semiconductor material and ferromagnetic material, a template for the production of diamond films with low misorientation, and a template for monocrystalline diamond film, the method comprising deposition of diamond on a film system wherein the film system exhibits a substrate film comprising at least one of monocrystalline silicon and silicon carbide, at least one buffer film arranged on that, at least one metal film made of iridium arranged on that, and diamond deposited on the at least one metal film.
A method for producing at least one of a break-resistant laser window, a break-resistant window for a gyrotron, a break-resistant x-ray window, a break-resistant membrane for x-ray lithography, and a high-performance electronic component for at least one of high temperatures, high powers, high frequencies, micromechanics, microelectromechanics, diamond cutters, carbide tools for cutters, milling cutters, and drills comprising one of monocrystalline diamond and quasi monocrystalline diamond, the method comprising deposition of diamond on a film system wherein the film system exhibits a substrate film comprising at least one of monocrystalline silicon and silicon carbide, at least one buffer film arranged on that, at least one metal film made of iridium arranged on that, and diamond deposited on the at least one metal film.
A method of producing a diamond film with little misorientation, the method comprising depositing diamond on a film system comprising at least one of monocrystalline silicon and silicon carbide, at least one buffer film arranged on the at least one of monocrystalline silicon and silicon carbide, at least one metal film made of iridium arranged on the at least one buffer film, and diamond deposited on the at least one metal film made of iridium.
Dependencies are inferred from the claim text.