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US 7,395,706 B2Granted
Micro sample heating apparatus and method of making the same
AssigneeTouch Micro-System Technology Inc.
InventorsChin-Chang Pan, Yu-Fu Kang
Life of this patent
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Abstract
A micro sample heating apparatus has a substrate, a micro heating device disposed on a first surface of the substrate, a cavity having an inclined sidewall and corresponding to the micro heating device positioned in a second surface of the substrate, and an isolation structure positioned on the second surface of the substrate. The isolation structure has an opening corresponding to the cavity, and the cavity and the opening form a sample room.
Claims16
A micro sample heating apparatus, comprising:
- a substrate;
- a micro heating device disposed on a first surface of the substrate;
- a cavity having an inclined sidewall and corresponding to the micro heating device positioned in a second surface of the substrate;
- and
- an isolation structure positioned on the second surface of the substrate, the isolation structure having an opening corresponding to the cavity;
- wherein the cavity and the opening form a sample room.
3 more elements
A method of fabricating micro sample heating apparatuses, comprising:
- providing a substrate, and forming a plurality of micro heating devices on a first surface of the substrate;
- forming a plurality of cavities corresponding to the micro heating devices in a second surface of the substrate, each cavity having an inclined sidewall;
- providing an isolation structure having a plurality of openings;
- and
- bonding the isolation structure to the second surface of the substrate, each opening being corresponding to each cavity;
- wherein each cavity and each opening corresponding to the cavity form a sample room.
3 more elements
Dependencies are inferred from the claim text.