US 7,395,693 B2 · Embedded piezoelectric microcantilever sensors

Abstract

An apparatus and method for sensing chemical and/or biological analytes includes a deflectable arm of a microcantilever at least partially embedded within a sensing element. A gaseous or liquid medium which may include the analyte being detected is introduced to the sensing element. The sensing element undergoes volumetric expansion or contraction in the presence of the analyte sought to be detected, typically by adsorbing the analyte. The volumetric change of the sensing element causes the deflectable arm to deflect. The deflectable arm includes at least one measurable physical property which changes when the arm deflects. Detecting means are provided to measure the change in the physical property to determine the presence and amount of analyte present. An array of microcantilevers in which each microcantilever is dedicated to detecting a particular analyte which may be included in the medium, is also provided.

Claims17

Dependent claims

A microcantilever sensor, comprising:

a polymeric sensing material having at least one receptor bound to said sensing material that selectively binds an analyte, wherein said polymeric sensing material is capable of a volumetric change when the receptor is brought into contact with said analyte;
a deflectable arm having a first end fixedly coupled to a substrate, and a second end capable of deflecting responsive to a volumetric change of the polymeric sensing material, wherein said polymeric sensinci material is disposed on a further substrate;
and a detecting element which creates a detectable signal in response to the deflection of said arm.

Dependencies are inferred from the claim text.

Embedded piezoelectric microcantilever sensors

Life of this patent

Embedded piezoelectric microcantilever sensors

Life of this patent

Abstract

Claims17