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US 7,395,611 B2Granted
System processing a substrate using dynamic liquid meniscus
AssigneeLam Research Corporation
InventorsJames P. Garcia, John M. de Larios, Michael Ravkin, Fred C. Redeker, Carl Woods
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Abstract
A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.
Claims20
A system for moving a meniscus comprising:
- a first surface;
- a second surface being substantially co-planar with the first surface;
- a proximity head having a proximity head surface including:
- a plurality of source inlets for delivering a quantity of liquid to a liquid meniscus;
- and
- a plurality of source outlets for removing at least a portion of the quantity of liquid from the liquid meniscus;
- and
- an actuator coupled to the proximity head wherein the actuator moves the proximity head in a first direction substantially parallel to the first surface and the second surface, wherein the proximity head forms the liquid meniscus between the proximity head surface and at least one of the first surface or the second surface.
5 more elements
A system for moving a meniscus comprising:
- an edge platform;
- a substrate being substantially co-planar with the edge platform, the edge platform being separated from the substrate by a gap;
- a proximity head having a bottom surface including:
- a plurality of source inlets for delivering a quantity of liquid to a liquid meniscus;
- a plurality of source outlets for removing at least a portion of the quantity of liquid from the liquid meniscus;
- and
- at least one surface tension control port;
- and
- an actuator coupled to the proximity head and wherein the actuator moves the proximity head in a first direction substantially parallel to the edge platform and the substrate, wherein the proximity head forms the liquid meniscus between the bottom surface of the proximity head and at least one of the edge platform or the substrate.
6 more elements
A system for moving a meniscus onto an edge of a substrate comprising:
- a substrate including a circumferential edge;
- a proximity head having a concave portion, the concave portion capable of receiving a portion of the circumferential edge of the substrate, the concave portion including:
- a plurality of source inlets for delivering a quantity of liquid to a liquid meniscus;
- and
- a plurality of source outlets for removing at least a portion of the quantity of liquid from the liquid meniscus, wherein the proximity head forms the liquid meniscus within the concave portion of the proximity head.
2 more elements
Dependencies are inferred from the claim text.