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US 7,395,131 B2Granted
Method for processing data based on the data context
AssigneeTokyo Electron Limited
InventorMerritt Funk
Life of this patent
Estimating the term…
Abstract
A method for managing collected data in a semiconductor processing environment. The collected data can include: raw data collected during a process, trace file data received during a process, and process log file data received during a process. The raw data is synchronized with the trace file data and process log file data to create wafer data and summary data, and a file is created containing the wafer data and the summary data.
Claims23
A method for managing data in a semiconductor processing environment, the method comprising:
- collecting raw data during a process from one or more processing tools, each having one or more process modules, wherein the raw data includes maintenance counter data;
- receiving trace file data and process log file data from the one or more processing tools;
- synchronizing the raw data with the trace file data and process log file data to create wafer data, wherein time synchronization is used to relate the wafer data to recipe steps;
- calculating summary data from the raw data using time series data files;
- creating a plurality of files containing the wafer data and the summary data, the plurality of files consisting of Alert files, DbArchive files, Event files, Raw files, and RawIndex files;
- and
- storing the plurality of files in a real-time database using a subscription server, the real-time database including multiple data hubs.
4 more elements
Dependencies are inferred from the claim text.