Resistance change memory device having a variable resistance element with a recording layer electrode served as a cation source in a write or erase mode

A resistance change memory device comprising:

• a semiconductor substrate;
• at least one cell array, in which memory cells are arranged, formed above the semiconductor substrate, each the memory cell having a stack structure of a variable resistance element and an access element, the variable resistance element storing a high resistance state or a low resistance state in a non-volatile manner, the access element having such an off-state resistance value in a certain voltage range that is ten times or more as high as that in a select state;
• and
• a read/write circuit formed on the semiconductor substrate as underlying the cell array for data reading and data writing in communication with the cell array, wherein
• the variable resistance element comprises:
• a recording layer formed of a composite compound containing at least one transition element and a cavity site for housing a cation ion;
• and
• electrodes formed on the opposite sides of the recording layer, one of the electrodes serving as a cation source in a write or erase mode for supplying a cation to the recording layer to be housed in the cavity site therein.