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US 7,393,714 B2Granted
Method of manufacturing external force detection sensor
AssigneeMurata Manufacturing Co., Ltd.
InventorTakahiro Oguchi
Life of this patent
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Abstract
A method of manufacturing an external force detection sensor in which a sensor element is formed by through-hole dry etching of an element substrate, and an electrically conductive material is used as an etching stop layer during the dry etching.
Claims14
A method of manufacturing an external force detection sensor, comprising the steps of:
- providing an element substrate including a front surface side and a back surface side having a sensor element forming area;
- forming an etching stop layer of a conductive material only in the sensor element forming area of the back surface side of the element substrate;
- arranging a support substrate with a recessed portion therein on the back surface side of said element substrate, the recessed portion being arranged opposite to the etching stop layer of said element substrate;
- joining the support substrate to the element substrate;
- through-hole dry etching the front surface side of the element substrate until reaching the etching stop layer so as to form a sensor element.
2 more elements
Dependencies are inferred from the claim text.