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US 7,393,468 B2Granted
Adhesive with differential optical properties and its application for substrate processing
AssigneeIntel Corporation
InventorsDaoqiang Lu, Eric J. Li
Life of this patent
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Abstract
An adhesive adapted with particular optical properties, and its use to couple a substrate to a substrate holder during substrate processing are disclosed. After processing the substrate, the optical properties of the adhesive may be exploited to locate and/or remove adhesive residue that may be present on the substrate.
Claims5
An adhesive composition, comprising:
- an adhesive base;
- and
- a moiety including fluorescent polymer particles, the moiety having a first fluorescent spectrum that is sufficiently different from a second fluorescent spectrum of a substrate, to facilitate detection of adhesive residue left on the substrate, after the substrate is decoupled from a support substrate that is coupled to the substrate using the adhesive composition, wherein the fluorescent polymer particles comprise a chemical having a formula C41H44N4O10S2.
An adhesive composition, comprising;
- an adhesive base including monomers;
- and
- a moiety, the moiety having a first fluorescent spectrum that is sufficiently different from a second fluorescent spectrum of a substrate, to facilitate detection of adhesive residue left on the substrate, after the substrate is decoupled from a support substrate that is coupled to the substrate using the adhesive composition, the moiety including one or more fluorescent functional groups, the one or more fluorescent functional groups to be incorporated into the monomers when the monomers are polymerized, wherein the one or more fluorescent functional groups comprises at least 5-carboxynaphthofluorescein, 5-carboxy-X-rhodamine (C33H30N2O5), or 6-carboxy-X-rhodamine (C33H30N2O5).
Dependencies are inferred from the claim text.