A surface scan measuring device, comprising:
- a scanning probe having a detecting section for detecting the relative position of the detecting section relative to a surface of a workpiece along a normal line direction of the surface of the workpiece, the scanning probe being adapted to scan the surface of the workpiece in a condition where the relative position of the detecting section relative to the surface of the workpiece is maintained within a predetermined range centered at a predefined reference position;
- a moving section for moving the scanning probe;
- a measurement data storage section for sampling an output of the detecting section and a drive quantity of the moving section at a predetermined sampling pitch and storing the sampled data as measurement data;
- a measurement condition deciding section including a surface condition determining section for determining a surface condition of the workpiece according to the measurement data, the measurement condition deciding section being adapted to decide, according to the determined surface condition, an adaptive measurement control condition by determining or adjusting at least one of measurement parameters, that include a moving speed for moving the scanning probe and the sampling pitch, and control parameters, that include control gains;
- a scanning vector commanding section for issuing a scanning vector command for moving the scanning probe according to the moving speed;
- a drive control section for driving and controlling the moving section according to the scanning vector and the control parameters;
- a measurement condition storage section for storing:
- a specified region defined and input in advance;
- and at least one of the measurement parameters and the control parameters as measurement conditions in the specified region;
- and
- a specified region judging section for judging whether or not a current scanning point of the scanning probe is in the specified region, wherein
- when the current scanning point is judged to be in the specified region by the specified region judging section, the scanning vector commanding section is adapted to issue the scanning vector command according to the at least one of the parameters stored in the measurement condition storage section while the measurement data storage section samples the measurement data according to the at least one of the parameters stored in the measurement condition storage section.