Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods

A method for varying the capacitance of two conductive plates, the method comprising:

• (a) providing a micro-electro-mechanical system (MEMS) variable capacitor comprising:
• (i) a movable component being movable with respect to a substrate and comprising a first and second portion, wherein the first portion is positioned further from the substrate than the second portion;
• (ii) first and second actuation electrodes being spaced apart a distance, wherein the first actuation electrode is attached to the first portion of the movable component, wherein the second actuation electrode is attached to the substrate, and wherein the first actuation electrode is movable in a substantially straight direction with respect to a normal of a surface of the second actuation electrode when a voltage is applied across the first and second actuation electrodes;
• (iii) a first capacitive electrode attached to the second actuation electrode;
• and
• (iv) a second capacitive electrode attached to the second portion of the movable component and spaced a distance from the first capacitive electrode for movement of the first capacitive electrode with respect to the second capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes,
• wherein the substrate is attached to the second actuation electrode and the second capacitive electrode,
• wherein the second actuation electrode is buried in the substrate, and
• wherein the distance spacing the capacitive electrodes is one-third or less than the distance spacing the actuation electrodes;
• and
• (b) applying a voltage across the first and second actuation electrodes.

A method for varying the capacitance of two conductive plates, the method comprising:

• (a) providing a micro-electro-mechanical system (MEMS) variable capacitor comprising:
• (i) first and second actuation electrodes being spaced apart a distance, and at least one of the actuation electrodes being movable with respect to the other actuation electrode when a voltage is applied across the first and second actuation electrodes
• (ii) a first capacitive electrode attached to and electrically isolated from the first actuation electrode;
• and
• (iii) a second capacitive electrode attached to the second actuation electrode and spaced a distance from the first capacitive electrode for movement of at least one of the capacitive electrodes in a substantially straight direction with respect to a normal of a surface of the other capacitive electrode upon application of voltage across the first and second actuation electrodes to change the capacitance between the first and second capacitive electrodes;
• (iv) a movable component attached to the at least one movable actuation electrode and the at least one movable capacitive electrode, wherein the movable component comprises first and second portions, wherein the first portion is positioned further from the first actuation electrode than the second portion, wherein the first actuation electrode is attached to the first portion of the movable component, wherein the first capacitive electrode is attached to the second portion of the movable component, and wherein the distance between the actuation electrodes is larger by a factor of three or more than the distance between the capacitive electrodes;
• and
• (b) applying a voltage across the first and second actuation electrodes for moving the capacitive electrodes with respect to one another.