Parallel control method for sequential process control flow
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYi-Da Chen, Yao-Hsiung Chang, Dan Ho
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Abstract
A parallel control method for sequential process control flow. First, a parallel step including a plurality of independent sub-steps is generated in a sequential process control flow. One of the sub-steps is directed to execute at a time, and any sub-step gains the right to execute when the other sub-steps are in waiting state. It is assessed the parallel step is complete by whether all of the sub-steps are complete, and the sequential process control flow is controlled to a next step succeeding the parallel step if the parallel step is complete.
Claims12
A parallel control method for sequential process control flow, comprising the steps of:
- selecting a plurality of independent sub-steps in a sequential process control flow;
- generating a parallel step including the sub-steps in the sequential process control flow;
- during an execution of the parallel step, an execution right is provided, wherein only one of the sub-steps gains the execution right at a time;
- directing one of the sub-steps to gain the execution right, and execute at a time;
- when the executed sub-step enters to a waiting state, releasing the execution right, and gaining of the execution right by one of the sub-steps to execute;
- assessing the parallel step is complete if all of the sub-steps are complete;
- and
- controlling the sequential process control flow to a next step succeeding the parallel step if the parallel step is complete.
A machine-readable storage medium storing a computer program which, when executed, directs a computer to perform a parallel control method for sequential process control flow, comprising the steps of:
- selecting a plurality of independent sub-steps in a sequential process control flow;
- generating a parallel step including the sub-steps in the sequential process control flow;
- during an execution of the parallel step, an execution right is provided, wherein only one of the sub-steps gains the execution right at a time;
- directing one of the sub-steps to gain the execution right, and execute at a time;
- when the executed sub-step enters to a waiting state, releasing the execution right, and gaining of the execution right by one of the sub-steps to execute;
- assessing the parallel step is complete if all of the sub-steps are complete;
- and
- controlling the sequential process control flow to a next step succeeding the parallel step if the parallel step is complete.
Dependencies are inferred from the claim text.