Driving apparatus, exposure apparatus, and device manufacturing method

A driving apparatus for moving an object, said apparatus comprising:

• a first actuator which drives the object in X and Y directions;
• a second actuator which drives a reaction force counter which receives a reaction force generated when said first actuator drives the object;
• and
• a controller which calculates X- and Y-direction reaction forces and a moment reaction force on the basis of X- and Y-direction positions of the object and X- and Y-direction accelerations of the object, which are to be received by said reaction force counter when the object is driven by said first actuator, and controls said second actuator so as to cancel said reaction forces and said moment reaction force,
• wherein said controller calculates the X- and Y-direction reaction forces Fx and Fy to be received by said reaction force counter and the moment reaction force Fr, in accordance with:
• Fx =m·AccX
• Fy =m·AccY, and
• Fr =y·Fx−x·Fy =m(y·AccX−x·AccY)
• where m, x, and y are a weight, X-direction position, and Y-direction position, respectively, of the object, and AccX and AccY are X- and Y-direction accelerations, respectively.