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US 7,384,696 B2Granted
Corrosion resistant member and method for manufacturing the same
AssigneeKYOCERA Corporation
InventorsTetsuji Hayasaki, Masahiro Nakahara
Life of this patent
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Abstract
A corrosion resistant member comprising a base material made of ceramics or a metal and at least one layer of corrosion resistant film formed on the surface of the former. At least one layer of the corrosion resistant film is a corrosion resistant film formed from a compound of the group 3 element as the main component and has specific characteristics so that it can improve film property.
Claims8
A corrosion resistant member comprising:
- a base material including ceramics or a metal and
- at least one layer of corrosion resistant film formed on the surface of said base material,
- wherein at least one layer of said corrosion resistant film in a PVD corrosion resistant film formed from a group 3 element compound as the main component, and said PVD corrosion resistant film has a value of ratio I400/I222 of peak intensity I400 assignable to (400) plane to peak intensity I222 assignable to (222) plane of X-ray diffraction not higher than 0.5.
Dependencies are inferred from the claim text.