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US 7,384,618 B2Granted
Purification of nitrogen trifluoride
AssigneeHoneywell International Inc.
InventorsRajiv R. Singh, Martin R. Paonessa, Matthew H. Luly, David F. Orlowski
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Abstract
A process and system for adsorption purification of NF3 wherein a crude product containing NF3 and impurities such as CF4 is brought into contact with a polyacrylonitrile-based carbon molecular sieve so that at least a portion of one or more impurities are adsorbed by the sieve without a significant adsorption of the NF3.
Claims16
A process for purifying NF3 comprising the steps of:
- (a) providing a crude product comprising NF3 and a CF4 impurity, wherein said impurity is present at a first concentration;
- (b) contacting said crude product with an adsorbent comprising a polyacrylonitrile-based carbon molecular sieve, wherein said molecular sieve adsorbs at least a portion of said CF4 impurity;
- and
- (c) separating said NF3 from said adsorbent to produce a purified NF3 product having a second concentration of said impurity, wherein said second concentration is lower than said first concentration.
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A system for continuously purifying NF3 comprising:
- (a) a crude product feed stream comprising NF3 and a CF4 impurity, wherein said impurity is present at a first concentration;
- (b) an adsorbent comprising a polyacrylonitrile-based carbon molecular sieve that is in contact with said feed stream;
- and
- (c) a purified NF3 product stream having a second concentration of said impurity, wherein said second concentration is lower than said first concentration.
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Dependencies are inferred from the claim text.