Silica glass crucible with bubble-free and reduced bubble growth wall
AssigneeHeraeus Shin-Etsu America, Inc.
InventorsKatsuhiko Kemmochi, Robert Mosier, Yasuo Ohama
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Abstract
A silica glass crucible includes a stable, bubble-free inner layer and an opaque outer layer, both layers demonstrating reduced bubble growth during a Czochralski process. When used in the CZ process, little volume change is observed in the crucible wall, and the crucible has little influence on melt level. The present crucible is especially suited for slow silicon ingot pulling with reduced crystalline defects. The fusion process of the present invention controls the dynamic gas balance at the fusion front where formed grain is melted to dense fused silica.
Claims19
A silica glass crucible having multiple layers comprising:
- an inner layer having a thickness of greater than approximately 2.0 mm and after a vacuum bake test in which the crucible is heated at approximately 1650 degrees C for approximately three hours at a pressure of approximately 0.1 Pa containing less than about 1% bubbles by volume in cross-sectional area, the diameter of the bubbles being less than about 0.3 mm;
- an outer layer having an apparent density after the vacuum bake test of equal to or greater than about 2.05 grams/cm3;
- and
- a crucible wall comprising at least the inner and outer layers, said wall increasing in thickness equal to or less than about 3% after the vacuum bake test.
A quartz crucible with an outer diameter of about 620 millimeters or more comprising:
- an opaque silica glass outer layer;
- and
- a transparent silica glass inner layer greater than approximately 2 millimeters thickness and having less than about 1% bubbles by volume in cross-sectional area after heating at approximately 1650 degrees C for approximately three hours at a pressure of approximately 0.1 Pa.
A fused silica crucible made according to the following method:
- rotating a mold having an inner mold surface defining a mold cavity and further having plurality of air channels formed in the mold and communicating with the inner surface;
- forming silica grain in the rotating crucible mold;
- heating the formed silica grain by applying electric power to electrodes positioned in the mold cavity;
- evacuating gas from the mold cavity at a first flow rate with an evacuation system configured to draw gas from the mold cavity into the air channels;
- continuing heating until an inner crucible layer approximately 2.0 mm thick is formed;
- changing the flow rate of gas evacuation to a second flow rate;
- and
- continuing heating until a second crucible layer is formed.
A fused silica crucible made according to the following method:
- feeding silica grain along an inner surface of a rotating mold to arrange the grain in a crucible shape having a radially inner surface open to an interior space of the mold and a radially outer surface adjacent an inner wall of the mold;
- heating the grain from the interior space of the mold;
- drawing air through the grain and into ports distributed in the inner wall of the mold;
- evolving gas from the heated grain;
- establishing a fission front that begins at the radially inner surface and proceeds toward the radially outer surface;
- maintaining a pressure differential between the fission front and the inner wall of the mold that draws gas away from the fission front at a rate faster than it is introduced until the silica grain forms a transparent glass layer greater than approximately 2 millimeters;
- and
- thereafter reducing the pressure differential between the fission front and the inner wall of the mold to a rate at which gas is drawn away from the fission front at a rate slower than it is introduced.
Dependencies are inferred from the claim text.