Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope

A gripper for delivering nano-manipulator probe tips inside a vacuum chamber, the gripper comprising:

• an outer tube;
• a compression cylinder inside of and coaxial with the outer tube;
• at least one elastic ring adjacent to the compression cylinder;
• a vacuum seal coaxial with the compression cylinder for receiving and sealing against a probe tip;
• and,
• an actuator connected to the compression cylinder for compressing the elastic ring and causing it to grip the probe tip.

A TEM sample holder for holding a probe tip with an attached sample, the TEM sample holder comprising:

• a bar having opposed ends;
• an arm attached to each opposed end of the bar;
• one or more slots for receiving a probe tip;
• and,
• each slot having an inner part and an outer part, where the inner part is smaller than the outer part.

A cassette for transferring one or more TEM sample holders, the cassette comprising:

• a platform;
• at least one bar extending upwardly from the platform;
• the bar having a groove;
• the groove receiving and holding a TEM sample holder.

A cassette for transferring one or more TEM sample holders, the cassette comprising:

• a platform;
• at least one bar extending upwardly from the platform;
• the bar having a slot for receiving a probe tip;
• and,
• the slot having an inner part and an outer part, where the inner part is smaller than the outer part.

A magazine for holding one or more probe tips, the magazine comprising:

• a rod supporting the magazine and concentric with it;
• a cartridge;
• the cartridge further comprising:
• a plurality of longitudinal openings for receiving probe tips;
• a shaft concentric with the cartridge;
• the shaft engaging the rod;
• a bearing concentric with the rod;
• a cover for the cartridge connected to the bearing;
• a end cover attached to the magazine;
• a first alignment hole in the magazine;
• a second alignment hole in the cartridge cover, so that the cartridge is closed for releasing a probe tip when the alignment holes are aligned with one another and with one of the longitudinal openings in the cartridge.

A kit for gripping and manipulating nano-manipulator probe tips, the kit comprising:

• a gripper, for selectively gripping and releasing a probe tip;
• a TEM sample holder;
• and,
• a cassette for transferring one or more TEM sample holders.

A method for delivering a nano-manipulator probe tip into and out of a FIB, the method comprising the steps of:

• providing a gripper kit;
• the gripper kit comprising:
• one or more probe tips;
• a gripper;
• a TEM sample holder;
• and,
• a cassette for transferring one or more TEM sample holders;
• inserting one or more probe tips into the cassette;
• passing the cassette and probe tips into the FIB;
• gripping the probe tip with the gripper and removing it from the cassette;
• attaching a lift-out sample to the probe tip;
• transferring the probe tip with the attached sample to the cassette;
• and,
• removing the cassette and the attached sample from the FIB.

A method for delivering a nano-manipulator probe tip into and out of a FIB, the method comprising the steps of:

• providing a gripper kit;
• the gripper kit comprising:
• a probe body, the probe body further comprising:
• a plurality of sections of reduced diameter at regular intervals;
• the sections of reduced diameter having a minimum diameter so that, when cut at the point of minimum diameter, the cut forms a tip point;
• a gripper;
• a TEM sample holder;
• and,
• a cassette for transferring one or more TEM sample holders;
• advancing a section of the probe body;
• cutting off the section, forming a probe tip having a tip point;
• gripping the probe tip with the gripper;
• attaching a lift-out sample to the probe tip;
• transferring the probe tip with the attached sample to the cassette;
• and,
• removing the cassette and the attached sample from the FIB.

A method for delivering a nano-manipulator probe tip into and out of a FIB, the method comprising the steps of:

• providing one or more probe tips, where the probe tips are contained in capsules;
• providing a probe shaft for delivering the capsules;
• providing a magazine for holding the capsules;
• providing a TEM sample holder;
• providing a cassette for transferring one or more TEM sample holders;
• inserting one or more capsules into the magazine;
• attaching a lift-out sample to one of the probe tips;
• ejecting the capsule containing the probe tip with the lift-out sample from the magazine;
• transferring the probe tip with the attached lift-out sample to the cassette;
• and,
• removing the cassette and the attached lift-out sample from the FIB.