Positioning device and method of initializing a positioning device
AssigneeCanon Kabushiki Kaisha
InventorYugo Shibata
Life of this patent
Estimating the term…
Abstract
In order to realize initializing sequences with high accuracy and high reproducibility, a positioning device according includes an XY slider movable in directions X and Y, an object position measuring device for measuring the position of the XY slider, an X beam guiding the XY slider in the direction Y and movable in the direction X, a Y beam guiding the XY slider in the direction X and movable in the direction Y, electromagnet units having at least two pairs of electromagnets provided on the XY slider in such a manner as to embrace side faces of the X beam and the Y beam, and a rotation regulating portion provided on the X beam for regulating the rotation of the X beam.
Claims9
A positioning device comprising:
- an object movable at least in X and Y directions;
- object position measuring means for measuring positions of the object;
- a first structure guiding the object in the Y direction and movable in the X direction;
- a second structure guiding the object in the X direction and movable in the Y direction;
- and
- at least two pairs of electromagnet units provided on the object in such a manner as to embrace side faces of the first structure and the second structure,
- wherein at least one of the first and second structures has a rotation regulating portion for regulating its rotation, the rotation regulating portion being movable with the at least one of the first and second structures.
An exposure device for positioning a substrate or a negative plate by use of a positioning device, the positioning device comprising:
- an object movable at least in X and Y directions;
- object position measuring means for measuring positions of the object;
- a first structure guiding the object in the Y direction and movable in the X direction;
- a second structure guiding the object in the X direction and movable in the Y direction;
- and
- at least two pairs of electromagnet units provided on the object in such a manner as to embrace side faces of the first structure and the second structure,
- wherein at least one of the first and second structures has a rotation regulating portion for regulating its rotation, the rotation regulating portion being movable with the at least one of the first and second structures.
A method of initializing a positioning device, said positioning device comprising:
- an object movable in first and second directions perpendicular to each other;
- object position measuring means for measuring positions of the object;
- a first structure guiding the object in the second direction and movable in the first direction;
- a second structure guiding the object in the first direction and movable in the second direction;
- and
- at least two pairs of electromagnet units provided on the object in such a manner as to embrace side faces of the first structure and the second structure,
- wherein at least one of the first and second structures has a rotation regulating portion for regulating its rotation;
- the method comprising:
- a step of attracting the object to the structure whose rotation is regulated by the rotation regulation portion using the electro-magnetic units;
- and
- a step of offsetting the object position measuring means when the object is attracted in the attracting step.
Dependencies are inferred from the claim text.