Polymeric optical waveguide film
AssigneeHitachi Chemical Company, Ltd.
InventorsMasatoshi Yamaguchi, Tooru Takahashi, Shigeru Koibuchi, Nobuo Miyadera
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Abstract
The present invention provides a polymeric optical waveguide film whose core and clad are constituted from polymer materials and which is characterized in that a protective layer of a polymer material having resistance to solvent attack higher than that observed for the clad is arranged on at least one of the surface and back face of the waveguide film. The present invention thus permits the preparation of such a film, the clad of which is hardly damaged, which is excellent in the resistance to solvent attack and which never undergoes cracking even when it is bought into contact with a commonly used solvent such as acetone.
Claims12
A method for the preparation of a polymeric optical waveguide film having protective films on both sides, wherein the method comprises, in order, the steps of:
- forming a first protective layer of polymer material having resistance to solvent attack higher than that observed for a lower clad layer on a silicon substrate provided thereon with a silicon oxide film;
- forming the lower clad layer;
- forming a core layer on the lower clad layer;
- forming an upper clad layer so as to completely cover the core layer and then forming a second protective layer of polymer material having resistance to solvent attack higher than that observed for the upper clad layer on the latter, to thus form a polymeric optical waveguide film on the silicon substrate;
- and thereafter immersing the resulting assembly in water to peel the optical waveguide film off from the silicon substrate.
A method for the preparation of a polymeric optical waveguide film having a protective film on one side thereof, wherein the method comprises, in order, the steps of:
- forming a protective layer of polymer material having resistance to solvent attack higher than that observed for a lower clad layer on a silicon substrate provided thereon with a silicon oxide film;
- forming the lower clad layer;
- forming a core layer on the lower clad layer and forming an upper clad layer so as to completely cover the core layer to thus form a polymeric optical waveguide film on the silicon substrate;
- and thereafter immersing the resulting assembly in water to peel the optical waveguide film off from the silicon substrate.
A method for the preparation of a polymeric optical waveguide film whose core and clad are constituted from polymer materials, the film comprising a protective layer of polymer material having resistance to solvent attack higher than that observed for the clad, wherein the protective layer is arranged on at least one of the surface and back face of the waveguide film, wherein the method of preparation comprises, in order, the steps of:
- (a) forming the protective layer of polymer material having resistance to solvent attack higher than that observed for a lower clad layer on a silicon substrate provided thereon with a silicon oxide film;
- (b) forming the lower clad layer;
- (c) forming a core layer on the lower clad layer and forming an upper clad layer so as to completely cover the core layer to form a polymeric optical waveguide film on the silicon substrate, thereby forming an assembly;
- and
- (d) thereafter immersing the resulting assembly in water to peel the optical waveguide film off from the silicon substrate.
Dependencies are inferred from the claim text.