Movable body position control device and stage device using the movable body position control device

A stage device, comprising:

• a fixed base;
• a stage movably provided against the fixed base and extending in a direction perpendicular to a moving direction;
• a guide part configured to guide both ends of the stage in the moving direction;
• a pair of driving parts configured to give a driving force to the both ends of the stage;
• a pair of position detectors configured to detect moving positions of the both ends of the stage;
• and
• a control part configured to control the driving parts so that the stage moves at a designated speed;
• wherein the control part includes
• a translation control part configured to make the driving parts generate the driving force whereby a difference of translation actions of the stage is prevented in a case where a moving speed of the stage is changed due to a disturbance, and configured to control the driving parts so that detected positions of the position detectors are consistent with each other;
• and
• a rotation control part configured to make the driving parts generate the driving force whereby a rotational action of the stage is prevented in a case where the moving speed of the stage is changed due to the disturbance and the stage is displaced in a rotational direction, and configured to control the driving parts so that the stage does not lean against the moving direction.