Electron beam source having an extraction electrode provided with a magnetic disk element
AssigneeApplied Materials, Inc.
InventorsSteven T. Coyle, Michael R. Scheinfein, William J. Devore
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Abstract
An electron beam source for use in an electron gun. The electron beam source includes an emitter terminating in a tip. The emitter is configured to generate an electron beam. The electron beam source further includes a suppressor electrode laterally surrounding the emitter such that the tip of the emitter protrudes through the suppressor electrode and an extractor electrode disposed adjacent the tip of the emitter. The extractor electrode comprises a magnetic disk whose magnetic field is aligned with an axis of the electron beam.
Claims22
An electron beam source for use in an electron gun, comprising:
- an emitter terminating in a tip, wherein the emitter is configured to generate an electron beam;
- a suppressor electrode laterally surrounding the emitter such that the tip of the emitter protrudes through the suppressor electrode;
- and
- an extractor electrode disposed adjacent the tip of the emitter, wherein the extractor electrode defines a lower aperture having an axis aligned with an axis of the electron beam axis and comprises a magnetic disk, that defines an upper aperture above the lower aperture, wherein the magnetic disk has a magnetic field that is aligned with the axis of the electron beam.
An electron beam source for use in an electron gun, comprising:
- an emitter terminating in a tip, wherein the emitter is configured to generate an electron beam;
- a suppressor electrode laterally surrounding the emitter such that the tip of the emitter protrudes through the suppressor electrode;
- and
- an extractor electrode disposed adjacent the tip of the emitter, wherein the extractor electrode comprises an extraction support defining a lower aperture and a magnetic disk disposed on the extraction support, wherein the magnetic disk is a permanent magnet defining an upper aperture above the lower aperture.
Dependencies are inferred from the claim text.