Piezoelectric resonator element, piezoelectric, resonator, and piezoelectric oscillator
AssigneeSeiko Epson Corporation
InventorMasako Tanaka
Life of this patent
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Abstract
Exemplary embodiments provide a piezoelectric resonator element, to reduce the reaching of an attenuating vibration of a main vibration to a marginal edge of the piezoelectric resonator element, as well as to stabilize an oscillating-frequency without worsening the CI value, nor inducing another vibration mode. The piezoelectric resonator element having a thickness shear vibration as a main vibration, a first groove and a second groove formed so as to surround the center part of a main surface, and the thickness at the first groove and the second groove structured to be between 70% to 96%, inclusive, of the thickness of the center part of the resonator element.
Claims15
A piezoelectric resonator element, comprising:
- main surfaces;
- and
- a groove formed on at least one of the main surfaces;
- the piezoelectric resonator element capable of forming a thickness shear vibration as a main vibration;
- one part of the groove facing another part of the groove, the groove sandwiching a center part of the piezoelectric resonator element, and the groove surrounding the center part of the piezoelectric resonator element;
- a thickness of the piezoelectric resonator element at the groove being between 96% and at least 80% of a thickness of the center part.
A piezoelectric resonator element, comprising:
- main surfaces;
- and
- a groove formed on at least one of the main surfaces;
- the piezoelectric resonator element capable of forming a thickness shear vibration as a main vibration;
- one part of the groove facing another part of the groove, the groove sandwiching a center part of the piezoelectric resonator element, and the groove surrounding the center part of the piezoelectric resonator element;
- a thickness of the piezoelectric resonator element at the groove being between 96% and at least 70% of a thickness of the center part;
- a plurality of the grooves being formed in a plurality of rows defined by intervals from the center part of the piezoelectric resonator element toward a marginal edge;
- and
- the width of the groove located at the outermost side of the main surface being larger than or equal to the thickness of the center part.
Dependencies are inferred from the claim text.