Substrate processing unit and substrate processing apparatus

A substrate processing unit comprising:

• a vertically-movable substrate holder for holding a substrate;
• a pan surrounding a periphery of said substrate holder;
• a cell, located below said substrate holder and within said pan, with a chemical processing section being in said cell;
• a cell cover, capable of closing a top opening of said cell, having spray nozzles positioned above an upper surface of said cell cover for separately spraying at least two types of processing liquids toward the substrate when held by said substrate holder,
• wherein said pan and said cell each have an individual liquid discharge line;
• and
• a pure water spray nozzle, for spraying pure water toward the substrate after chemical processing and while the substrate is held by said substrate holder, within said cell.