Process for recovery, purification, and recycle of argon

A system for the purification of an impure argon stream comprising oxygen, nitrogen, carbon monoxide, carbon dioxide, water, hydrocarbons, and dopants from a silicon crystal growth furnace, the system comprising:

• a scrubber that is in fluid communication with the silicon crystal growth furnace and that strips the dopants from the impure argon stream at an ambient temperature;
• a deoxygenation catalyst bed that is in fluid communication with the scrubber and substantially removes the oxygen from the impure argon stream;
• a plurality of adsorption beds that are in fluid communication with the deoxygenation catalyst bed wherein at least one of the adsorption beds selectively adsorbs water and carbon dioxide upon contact with the impure argon stream;
• a cryogenic temperature separation apparatus that is in fluid communication with the plurality of adsorption beds and that separates the impure argon stream into a partially purified argon stream comprising oxygen, carbon monoxide, and hydrogen impurities and an effluent stream comprising nitrogen, hydrocarbons, and hydrogen;
• and
• a plurality of metal catalyst beds that are in fluid communication with the cryogenic temperature separation apparatus and wherein at least one of the metal catalyst beds removes the hydrogen, carbon monoxide, and oxygen impurities from the partially purified argon stream and provides the purified argon product.