Automated pattern recognition of imprint technology
AssigneeKLA-Tencor Technologies Corporation
InventorBryan L. Snyder
Life of this patent
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Abstract
An apparatus and method for control of spreading of liquid drops are disclosed. An initial pattern of drops of liquid is deposited on a first surface. A second surface is brought into sufficient contact with the initial pattern of the drops that the liquid starts to spread. Two or more digital images of the liquid are captured after it begins to spread. A digital analysis is performed on these images to determine whether one or more portions of the initial pattern of drops require more or less liquid. A subsequent pattern of liquid droplets is adjusted based on the digital analysis.
Claims22
A method for control of spreading of liquid droplets, comprising:
- depositing an initial pattern of drops of a liquid on a first surface;
- bringing a second surface into sufficient contact with at least a portion of the initial pattern of drops on the first surface that the liquid begins to spread;
- capturing one or more digital images of the liquid after it begins to spread;
- performing a digital analysis of the one or more images to determine whether one or more portions of the initial pattern of drops require more liquid;
- and
- adjusting a subsequent pattern of drops of liquid based on the digital analysis of the two or more images.
An apparatus for control of spreading of liquid droplets, comprising:
- a droplet dispenser configured to form an initial pattern of drops of liquid on a first surface;
- means for brining a second surface into sufficient contact with at least a portion of the initial pattern of drops on the first surface that the liquid begins to spread;
- a camera configured to capture one or more digital images of the liquid after it begins to spread;
- and
- a controller coupled to the droplet dispenser and the camera, the controller having a processor and a processor readable medium having embodied therein processor executable instructions, including
- an instruction for performing a digital analysis of the two or more digital images to determine whether one or more portions of the initial pattern of liquid drops require more liquid;
- and
- an instruction for adjusting a subsequent pattern of drops based on the digital analysis of the two or more images.
Dependencies are inferred from the claim text.