Torsion resonator and filter using this

Abstract

The invention provides a high-frequency torsion vibrator which can excite efficiently without having any paddle. The torsion vibrator is configured as a beam structure having an almost constant section and having no paddle and is disposed so as to be close to an electrode via a gap on the side surface of the beam thereof. An electrostatic capacitance between the vibrator and the electrode is adjusted so that the changing amount of the electrostatic capacitance per unit torsion vibration amount becomes maximum or the changing ratio of the electrostatic capacitance per unit AC voltage becomes maximum. This adjustment is made possible by controlling the thickness of the electrode in the case of using the semiconductor process. Further, when the vibrator is formed by monocrystalline silicon and the processing of the beam shape is performed by the anisotropic etching, the fine resonator which has a high Q value and has excellent surface property can be generated.

Dependencies are inferred from the claim text.