Method and system for smart vehicle route selection

A method of implementing a factory automation system for a wafer fabrication facility (“fab”) comprising a plurality of bays, wherein each of the bays comprise a plurality of equipment interconnected by an intrabay overhead transport (“OHT”) system, and at least one interbay OHT system for interconnecting the intrabay OHT systems, the method comprising:

• receiving a transfer request to move a wafer lot;
• obtaining lot information related to the transfer request from a manufacturing execution system (“MES”);
• obtaining dynamic traffic information related to the transfer request from a material control system (“MCS”);
• obtaining static traffic information related to the transfer request from an automated material handling system (“AMHS”);
• using the lot information, the dynamic traffic information, and the static traffic information to select a destination and a route to the selected destination to satisfy the transfer request;
• and
• executing the transfer using the selected destination and route to the selected destination.

A method of transferring a wafer lot within a wafer fabrication facility (“fab”) using a factory automation system, the method comprising:

• receiving a transfer request to move the wafer lot from a first position to a second position within the fab;
• obtaining lot information related to the transfer request from a manufacturing execution system (“MES”);
• obtaining dynamic traffic information related to the transfer request from a material control system (“MCS”);
• obtaining static traffic information related to the transfer request from an automated material handling system (“AMHS”);
• using the lot information, the dynamic traffic information, and the static traffic information to select a route between the first position and the second position;
• and
• executing the transfer using the selected route.