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US 7,354,168 B2Granted
Facet mirror having a number of mirror facets
AssigneeCarl Zeiss SMT GmbH
InventorsHubert Holderer, Andreas Heisler, Wolfgang Singer, Markus Weiss, Andreas Seifert, Frank Melzer, Heinz Mann, Jurgen Faltus, Berndt Warm, Stefan Dornheim
Life of this patent
Estimating the term…
Abstract
A facet mirror (10) is provided with a number of mirror facets (11), in which the mirror facets (11) respectively have a spherical or conical facet body (17) with a reflecting surface (12). The side of the facet body (17) averted from the reflecting surface (12) is mounted in a bearing device (15).
Claims6
A facet mirror, comprising:
- a carrier plate;
- a plurality of mirror facets, each of said mirror facets including a facet body having a bearing surface and a reflecting surface, said bearing surface being of a spherical or conical shape and being located on a side of said facet body averted from said reflecting surface, each said facet body being mounted adjustably in a bearing device arranged in said carrier plate, said side of each said facet body being provided with a guide member on which control means for adjusting said facet body act, said guide member having an end region averted from said reflecting surface, said end region being provided with a spherical or conical bearing member that forms an abutment relative to said bearing device, said guide member being arranged with play in said carrier plate, said control means acting on said bearing member.
Dependencies are inferred from the claim text.