Methods for configuring a plasma cluster tool
AssigneeLam Research Corporation
InventorsChung-Ho Huang, Shih-Jeun Fan, Chin-Chuan Chang
Life of this patent
Estimating the term…
Abstract
A method for configuring a plasma cluster tool is disclosed. The method includes generating a key file from option specifications, the key file encapsulating configuration restrictions specifically imposed on the plasma cluster tool. The method also includes generating at least one system-wide configuration file and at least one component-level configuration file using the key file. The method additionally includes generating run-time executable objects from a database of option definition files, the at least one system-wide configuration file and the at least one component-level configuration file. Furthermore, the method includes employing the run-time executable objects to configure the plasma cluster tool.
Claims20
A method for configuring a plasma cluster tool, comprising:
- generating a key file from option specifications;
- installing said key file on hardware of said plasma cluster tool;
- generating at least one system-wide configuration file and at least one component-level configuration file using said key file, said key file encapsulating configuration restrictions specifically imposed on said plasma cluster tool;
- generating run-time executable objects from a database of -option definition files, said at least one system-wide configuration file, and said at least one component-level configuration file;
- and
- employing said run-time executable objects to configure at least hardware of at least a component of said plasma cluster tool.
Dependencies are inferred from the claim text.