Micro-oscillator, semiconductor device and communication apparatus
AssigneeSony Corporation
InventorMasahiro Tanaka
Life of this patent
Estimating the term…
Abstract
A micro-oscillator is provided. In an example, the micro-oscillator applied to a signal filter and the like, ground capacitance thereof is reduced to control the loss of signal output. An oscillator element having a beam facing lower electrodes and to be electrostatically driven is formed on a substrate, and a wire width W1 of a DC bias feeder wire connected to the beam is formed to be narrower than a width of the beam.
Claims10
A micro resonator, comprising:
- a vibrating element formed on a substrate, and including a beam facing a lower electrode, wherein said vibrating element is electrostatically driven, wherein a DC bias feeder wire connected to said beam is formed to have a wire width narrower than the width of said beam.
A micro resonator, comprising:
- a plurality of vibrating elements arrayed on a substrate, each of said elements having a beam facing a lower electrode and are electrostatically driven, wherein beams of adjacent vibrating elements are connected through a DC bias feeder wire, and wherein the DC bias feeder wire is formed to have a wire width narrower than the width of said beams.
A micro resonator, comprising:
- a vibrating group formed on a substrate, in which a plurality of vibrating elements each having a beam facing a lower electrode and which are electrostatically driven are regularly arrayed, wherein beams of said vibrating elements adjacent to each other in one direction are connected through a DC bias feeder wire, and an interval between the DC bias feeder wires of said vibrating elements adjacent to each other in a direction intersecting said one direction is set larger than an interval between the beams.
A semiconductor device, comprising:
- a micro resonator including a vibrating element formed on a substrate, which has a beam facing a lower electrode and which is electrostatically driven, wherein a DC bias feeder wire connected to said beam is formed to have a wire width narrower than a width of said beam.
A communication apparatus including a filter to limit a bandwidth of a transmission signal and/or reception signal, said communication apparatus comprising:
- a filter using a micro resonator that includes a vibrating element formed on a substrate, which has a beam facing a lower electrode and which is electrostatically driven, wherein a DC bias feeder wire connected to said beam is formed to have a wire width narrower than a width of said beam.
Dependencies are inferred from the claim text.