Back to results
US 7,352,175 B2Granted
Probe card method
AssigneeFujitsu Limited
InventorHisanori Murata
Life of this patent
Estimating the term…
Abstract
A probe card method, wherein a base supports a probe pin and an electromagnet. When the probe pin contacts a magnetic-sensor terminal on a chip on a wafer, magnetic force is applied to a magnetic-field sensing section in the chip.
Claims2
A test method of testing characteristics of a magnetic sensor that has a magnetic-field sensing section that generates an output according to a magnetic force and magnetic-sensor terminals that sense remotely the output generated by the magnetic-field sensing section, the test method comprising:
- moving the magnetic sensor relative to a probe pin on a base to contact the probe pin and the magnetic sensor terminals to sense an output generated by the magnetic sensor;
- applying a magnetic force to the magnetic-field sensing section by an electromagnet being supported by the base, when the probe pin contacts the magnetic-sensor terminals;
- and
- moving the electromagnet with regard to the base by moving the magnetic sensor to cause the probe pin to contact the magnetic-sensor terminals, in a case where it is determined that the probe pin does not contact the magnetic sensor terminals as the electromagnet contacts the magnetic sensor.
1 more element
Dependencies are inferred from the claim text.