Chuck for holding a device under test

A chuck for a probe station comprising:

• (a) a first chuck assembly element having an upper surface thereon suitable to support a wafer;
• (b) a chuck spacing mechanism connected to said first chuck assembly element having exactly three independent supports defining the spacing between said first chuck assembly element and another chuck assembly element, each said support proximate said another chuck assembly element;
• and
• (c) a stabilizing member operatively engaged with at least one of said supports at a location at least partially between said first chuck assembly element and said another chuck assembly element, said stabilizing member inhibiting lateral movement of said first chuck assembly element with respect to said another chuck assembly element.