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US 7,352,033 B2Granted
Twin MONOS array for high speed application
AssigneeHalo LSI, Inc.
InventorsKimihiro Satoh, Tomoko Ogura, Ki-Tae Park, Nori Ogura, Yoshitaka Baba
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Abstract
The invention provides a metal bit structure of Twin MONOS memory cell with large channel width and its operational method for high-speed applications using a metal bit array.
Claims5
A twin MONOS metal bit array structure comprising:
- a plurality of memory cells two dimensionally disposed in a first direction, wherein memory cells adjacent in said first direction are separated by isolation regions, and in a second direction crossing said first direction perpendicularly;
- a plurality of metal bit line pairs;
- a plurality of substrate silicon isolations in substrate silicon configured in straight lines and isolated said substrate silicon stripes in between configured in straight lines wherein a pitch of said isolation is equal to two pitches of said metal bit line pairs;
- a plurality of conductive word gate lines crossing over said isolations and gate oxide overlying said silicon stripes extending in said second direction;
- a plurality of pairs of conductive control gate lines on sidewalls of said word gate lines extending in said second direction;
- a plurality of diffusion regions having opposite polarity to a polarity of said substrate silicon wherein said diffusion regions are located in said isolated silicon stripes between adjacent said conductive control gate lines in said first direction;
- and
- channels between adjacent said diffusion regions underlying said word gate lines and said control gates.
5 more elements
Dependencies are inferred from the claim text.