Back to results
US 7,351,990 B2Granted
Analyzer magnet chamber liner
AssigneeSystems on Silicon Manufacturing Co. Pte. Ltd.
InventorsWei Zhong Cao, Wai Leong Yip, Wen Jen Ronald Yeu, Hong Kiat Chia
Life of this patent
Estimating the term…
Abstract
A waveguide liner for an analyzer magnet chamber having three interlocking pieces of graphite, the liner pieces having sufficient size to allow them to stand freely without being secured, said liner pieces providing case of interchange and replacement in a Kestrel analyzer magnet chamber.
Claims15
A waveguide liner for an analyzer magnet chamber having three interlocking pieces of graphite, said liners having sufficient size to allow them to stand freely without being secured.
Dependencies are inferred from the claim text.